Overview of Substrate
Treat Substrate
1. Ge Substrate
(1) Washing Ge Substrate
Method 1: A mixture of pure water (made by Millipore), ammonia, hydrogen peroxide, and heating to 80. reduce the defect density [from Prof. Hirayama].
Method 2: Special grade acetone and ethanol for 5-10 min each+regular ultrasonic cleaning at RT. A clean/dedicated breaker with the substrate surface up [from Prof. Miyamachi].
(2) Ar+ Sputter-Annealing